LASER AUTOCOMLIMATING MICROSCOPE Russian patent published in 2017 - IPC G02B21/00 G01B9/04 

FIELD: physics.

SUBSTANCE: microscope contains two measuring channels. The first channel contains a radiation source with a wavelength λ₁, the first collimating lens, the first beam splitter located along the beam path, in the reflected beams of which the first spectrum splitter and the focusing lens are located, in the object plane of which the controlled surface is located. In the refracted beams of the first beam splitter in the reverse direction from the monitored surface, the first lens and the first multi-element radiation receiver are located. The second channel consists of a radiation source with a wavelength λ₂ and the second collimating lens, the second spectrum splitter loacted along the beam path, in the reflected beams of which the second beam splitter is located, and in the refracted rays in the reverse direction from the monitored surface the second lens and the second multi-element radiation receiver are located. In the reflected beams of the second beam splitter, the first spectrum splitter is located.

EFFECT: possibility of high-precision angular and linear measurements on a single device and minimization of dimensions.

23 cl, 9 dwg