PRESSURE STRAIN-GAUGE SENSOR Russian patent published in 2017 - IPC G01L9/04 

FIELD: measuring equipment.

SUBSTANCE: pressure strain-gauge sensor contains a square flat diaphragm made of monocrystalline silicon with a support frame and four longitudinal resistance strain-gauges. The resistance strain-gauges are located on the planar surface of the diaphragm, containing 12 identical square sockets with a side not less than the length of the resistance strain-gauge and with depth not more than half the thickness of the diaphragm. Four sockets are located in the center, and eight others - in pairs at the edges of the diaphragm symmetrically to its middle axes. The gap between the sockets is the same and equal to the width of the resistance strain-gauges, which are located between the sockets, two - in the center, and two - at the edges of the diaphragm, forming a bridge circuit.

EFFECT: increased sensitivity of the pressure strain-gauge sensor.

5 dwg