FIELD: measurement technology; measurement of pressure of liquids and gases.
SUBSTANCE: proposed strain gage transducer includes flat square membrane made from monocrystal silicon with longitudinal and transversal resistance strain gages; membrane has different thickness: thickness at edges exceeds that in center; resistance strain gages are located on part having greater thickness.
EFFECT: increased output signal of pressure strain gage transducer.
3 dwg
Title | Year | Author | Number |
---|---|---|---|
STRAIN TRANSDUCER OF PRESSURE | 2006 |
|
RU2329480C2 |
STRAIN-GAGE PRESSURE TRANSDUCER | 2002 |
|
RU2243517C2 |
PRESSURE STRAIN GAUGE | 0 |
|
SU1830138A3 |
SEMICONDUCTOR STRAIN-GAGE TRANSDUCER | 2005 |
|
RU2284074C1 |
PRESSURE STRAIN-GAUGE SENSOR | 2016 |
|
RU2631016C1 |
SENSITIVE ELEMENT OF PRESSURE AND TEMPERATURE TRANSDUCER | 2015 |
|
RU2606550C1 |
STRAIN TRANSFORMER OF PRESSURE | 2005 |
|
RU2293955C1 |
MICROELECTRONIC ABSOLUTE PRESSURE GAGE AND ABSOLUTE PRESSURE SENSOR | 2007 |
|
RU2362133C1 |
STRAIN PRIMARY PRESSURE TRANSDUCER WITH ZERO DRIFT COMPENSATION AND MEMBRANE FOR IT | 2004 |
|
RU2286555C2 |
INTEGRAL PRESSURE CONVERTER | 1993 |
|
RU2035089C1 |
Authors
Dates
2004-10-10—Published
2002-06-19—Filed