METHOD FOR SPUTTERING TITANIUM COATING ONTO HYDRIDE TITANIUM PARTICLES Russian patent published in 2017 - IPC B22F1/02 C23C14/34 C23C14/02 

FIELD: chemistry.

SUBSTANCE: invention relates to the field of modification of metal hydride materials, in particular to the method for sputtering a titanium coating onto titanium hydride particles, and can be used to manufacture radiation protection materials of biological protection in the nuclear industry. The titanium hydride particles are made in the form of a fraction, which is preliminarily purified with minimal holding in an ultrasonic bath with acetone for 10 minutes. Further, the titanium hydride fraction is treated with ionized water and dried with dry nitrogen. The ionic purification of the titanium hydride fraction surface is performed in the chamber for, at least, 7 minutes with an accelerating voltage of 2200 V and a current of 110 mA, which is placed on the object table at the distance of up to 110 mm from the magnetron. Sputtering the titanium coating is carried out by the method of ion-plasma vacuum magnetron sputtering for 24-37 min, with a rotation speed of the subject table to 25 rpm and simultaneous rotation of the titanium hydride fraction itself.

EFFECT: increasing the thermal stability of titanium hydride by improving the quality of the coating.

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