PROCEDURE FOR VACUUM APPLICATION OF COATING ON ITEMS OUT OF ELECTRIC CONDUCTING MATERIALS AND DIELECTRICS Russian patent published in 2011 - IPC C23C28/00 C23C14/02 C23C14/34 C23C14/35 

Abstract RU 2409703 C1

FIELD: machine building.

SUBSTANCE: procedure consists in cleaning and activation of item surface before application of coating with gas ions produced in plasma generator on base of non-self-maintained arc discharge with heated cathode, in electric-arc sputtering of cathode target and in settling produced flow onto item in atmosphere of gas preliminary ionised in plasma generator on base of non-self-maintained arc discharge with heated cathode. Upon cleaning and activation a binding sub-layer is settled on surface of items with cathode target magnetron sputtering out of material of specified component composition. Further, there is formed an intermediate transition layer at simultaneous cathode target magnetron and electric arc sputtering and at settling produced mixed flow onto the binding sub-layer in atmosphere of gas preliminary ionised in the plasma generator; current of magnetron discharge is gradually reduced to zero.

EFFECT: fabrication of item with coating possessing improved functionality under severe operational conditions.

2 cl, 4 ex

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RU 2 409 703 C1

Authors

Savostikov Viktor Mikhajlovich

Potekaev Aleksandr Ivanovich

Kuz'Michenko Vladimir Mikhajlovich

Dates

2011-01-20Published

2009-08-03Filed