FIELD: technological processes.
SUBSTANCE: first, bottom layer of titanium nitride is applied. Further an intermediate layer of the nitride of the titanium and silicon compounds is applied at a ratio, wt %: titanium 97.9-98.5, silicon 1.5-2.1. Then, an upper layer of nitride of the titanium, silicon and niobium compound is applied at a ratio, wt %: titanium 88.6-93.0, silicon 1.0-1.4, niobium 6.0-10.0. The coating layers are applied horizontally in one plane by three cathodes, the first of which is made of a titanium and silicon alloy, the second one is made of a titanium and niobium composite and is placed opposite the first, and the third is made of titanium and is placed between them. The lower layer is applied using a third cathode, the intermediate layer is applied using first and third cathodes, and the upper layer is applied using all three cathodes.
EFFECT: increased efficiency.
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Authors
Dates
2018-01-11—Published
2016-12-20—Filed