FIELD: measuring equipment.
SUBSTANCE: laser interferometer comprises a source of coherent monochromatic radiation, a collimator, a beam splitter separating the beam into the object and reference beams. Acoustic-optical modulators are installed in the reference and object beams. The reference beam and the beam reflected from the studied object are directed to a common photodetector. The interferometer comprises a line of the generator signal adjustable delay, which is made in the form of a stepped phase shifter.
EFFECT: improved measurement accuracy and noise immunity.
4 cl, 7 dwg
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