DEVICE FOR MEASUREMENT OF DEVIATIONS FROM LINEARITY Russian patent published in 1997 - IPC

FIELD: measuring equipment, in particular, laser interferometry, applicable for checking the shape deviations. SUBSTANCE: the device uses a source of monochromatic radiation and a corner reflector optically integrated with it, installed on a carriage, acoustooptical modulator, collimator and a photodetector; a phase-lock loop and a delay line with a variable delay value are series-connected between the photodetector output and the electric input of the acoustooptical modulator. EFFECT: enhanced accuracy and expanded measurement range. 1 dwg