FIELD: measurement technology; determination of deviation from linearity. SUBSTANCE: method consists in forming set of diffraction orders of different frequencies due to conversion of laser radiation and two groups of diffraction orders are made from it. Each group of diffraction orders forms two interference patterns. Then, two output signals are obtained due to conversion of interference patterns. Shift of object is judged from proportional change in frequency of output signals. EFFECT: reduced number of photodetectors at simultaneous increase of number of coordinates under test. 4 dwg
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Authors
Dates
2001-11-10—Published
2000-02-24—Filed