FIELD: motors and pumps.
SUBSTANCE: invention relates to a micropump comprising a one way valve comprising: conically shaped valve seat (1); and membrane (2) having hole (3) that is located around conical valve seat (1), such that surface (60) of valve seat (1) seals onto inner periphery (61) of hole in membrane (2).
EFFECT: in use, membrane (2) is deflected from surface (60) of valve seat (1) to provide a fluid path across membrane (2) and allowing fluid to flow from one side of membrane (2) to another.
21 cl, 7 dwg
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