FIELD: machine building.
SUBSTANCE: invention relates to a microvalve for use in biosensor, to a micro fluid device, to use of said device, as well as to a micro fluid element. Normally closed microvalve for use in microfluidic device comprises a body part, a seat, an inlet and an outlet and a flexible pre-deformed membrane. Flexible pre-deformed membrane is located so that preliminary compression or preliminary tension presses membrane to valve seat in a normally closed position. Valve is designed to open vacuum under action of force applied to membrane.
EFFECT: technical result is higher reliability, in particular, higher reliability of closed state of valve.
14 cl, 21 dwg
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