FIELD: optics.
SUBSTANCE: device has controlled surface, phase plate λ/4, area plate, center of which coincides with curvature center of controlled surface, light splitter made in form of polarization cube, output diaphragm, projection objective, registering device, all of these being placed serially. Device also has light source, optical axis of which is perpendicular to main optical axis, having internal light source and objective for forming a convergent beam of rays. Axes of phase plate λ/4 are directed at angle of 45° to polarization vector of light-splitting cube.
EFFECT: increased precision, reliability, interference resistance.
2 cl, 5 dwg
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