FIELD: applied metrology.
SUBSTANCE: inventions relate to the field of applied metrology and can be used to create devices for accurate reproduction, pressure and vacuum measurement, to automate calibration procedures, verification and accurate maintenance of pressure in a small capacity. Claimed group of inventions includes a method of setting pressure in a controlled volume and an installation for setting pressure in a controlled volume. Moreover, the method of setting the pressure in the controlled volume is that the auxiliary preset is set and regulated in the auxiliary receiver, close to the preset, depending on the pressure in the main receiver connected to the monitored external volume, the preliminary pressure is set higher or lower than the preset pressure, the magnitude and sign of the deviation is determined by the magnitude and sign of the deviation of the pressure from the preset in the controlled volume, wherein the pressure in the controlled volume is maintained constant by supplying or discharging gas from the secondary receiver through two parallel valves of large and low capacity, while the small supported pressure difference in the two receivers and the low throughput of one of the valves ensure a smooth change and high accuracy of maintaining pressure in the controlled volume.
EFFECT: technical result is an improvement of the method and design for the implementation of the task pressure and rarefaction, increase of reliability and service life of means of setting pressure-rarefaction task while maintaining high accuracy of regulation.
2 cl, 1 dwg
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Authors
Dates
2018-04-17—Published
2017-03-02—Filed