METHOD OF REPARATION OF CADMIUM SULFIDE FILMS ON A MONOCRYSTALLINE SILICON Russian patent published in 2018 - IPC C30B28/04 C30B29/50 C23C18/12 C23C18/16 H01L21/02 H01L31/18 B82B3/00 B82Y30/00 B82Y40/00 

Abstract RU 2651212 C1

FIELD: chemistry.

SUBSTANCE: invention relates to the production of polycrystalline films of sulfide and cadmium oxide on monocrystalline silicon by means of an aerosol pyrolysis technique of a solution on a heated substrate at a constant temperature in the range of 450–500 °C. According to the invention, the pyrolysis of the aerosol is carried out in two steps: on the former, a 0.03 mol/l aqueous solution of cadmium chloride or nitride is used as the spray solution, and on the second – 0.15 mol/l aqueous solution of thiourea.

EFFECT: technical result of the invention consists in the deposition of mirror-smooth polycrystalline films of hexagonal modification of cadmium sulfide up to 250 nm thick in monocrystalline silicon, which have good adhesion to the substrate.

1 cl, 2 dwg, 2 ex

Similar patents RU2651212C1

Title Year Author Number
METHOD OF PRODUCING FILMS OF SOLID SOLUTIONS OF SUBSTITUTION OF PBCDS BY ION-EXCHANGE TRANSFORMATION OF CDS FILMS 2019
  • Chufarova Natalya Aleksandrovna
  • Markov Vyacheslav Filippovich
  • Maskaeva Larisa Nikolaevna
RU2738586C1
METHOD OF GROWING CADMIUM SULPHIDE NANOPARTICLES ON CARBON NANOTUBES AND METHOD OF MAKING LIGHT SOURCE 2010
  • Okotrub Aleksandr Vladimirovich
  • Larionov Stanislav Vasil'Evich
  • Gusel'Nikov Artem Vladimirovich
  • Asanov Igor' Petrovich
  • Kudashov Aleksej Gennad'Evich
  • Bulusheva Ljubov' Gennad'Evna
  • Kvashnin Aleksandr Georgievich
RU2459316C2
METHOD FOR PRODUCING SUBSTRATE BASED ON SILICON CARBIDE AND SILICON CARBIDE SUBSTRATE 2018
  • Nagasawa Hiroyuki
  • Kubota Yoshihiro
  • Akiyama Shoji
RU2756815C2
PROCESS OF PHOTOCONDUCTIVE RADIATION-PROOF FILM MANUFACTURING 2006
  • Stetsjura Svetlana Viktorovna
  • Glukhovskoj Evgenij Gennad'Evich
  • Serdobintsev Aleksej Aleksandrovich
  • Maljar Ivan Vladislavovich
RU2328059C1
CHEMICAL DEPOSITION FROM VAPOUR PHASE AT ATMOSPHERIC PRESSURE 2005
  • Dzhonston Norman V.
RU2421418C2
MANUFACTURING METHOD OF FUNCTIONAL ELEMENT OF SEMICONDUCTOR DEVICE 2019
  • Kukushkin Sergej Arsenevich
  • Osipov Andrej Viktorovich
  • Feoktistov Nikolaj Aleksandrovich
RU2727557C1
METHOD FOR PREPARING PHOTOSENSITIVE CADMIUM SULFIDE FILMS 0
  • Kolpakov A.V.
  • Kontush S.M.
  • Serdyuk V.V.
  • Turetskij A.E.
  • Chemeresyuk G.G.
SU890907A1
SUBSTRATE COATED WITH COMPOSITE FILM, METHOD OF MANUFACTURE OF SUCH SUBSTRATES AND THEIR APPLICATION 2002
  • Zhakio Katrin
  • Berk'E Zhan-Mark
  • Besson Sofi
  • Bualo Zhan-P'Er
  • Rikollo Kristian
  • Gakuan T'Erri
RU2288167C2
ARTICLE CONTAINING A SILICON BASE AND A COATING LAYER IN THE FORM OF A NANOFILM OF CARBON WITH A DIAMOND-TYPE CRYSTAL LATTICE, AND A METHOD OF MAKING SAID ARTICLE 2019
  • Kukushkin Sergej Arsenevich
  • Osipov Andrej Viktorovich
  • Feoktistov Nikolaj Aleksandrovich
RU2715472C1
METHOD OF PRODUCING THIN EPITAXIAL LAYERS OF β-SIC ON MONOCRYSTALLINE SILICON 2013
  • Kargin Nikolaj Ivanovich
  • Gusev Aleksandr Sergeevich
  • Ryndja Sergej Mikhajlovich
  • Zenkevich Andrej Vladimirovich
  • Pavlova Elena Pavlovna
RU2524509C1

RU 2 651 212 C1

Authors

Naumov Aleksandr Vladimirovich

Sergeeva Anastasiya Valerevna

Semenov Viktor Nikolaevich

Vasileva Svetlana Yurevna

Dates

2018-04-18Published

2017-03-23Filed