VIBRATION FREQUENCY GAUGE OF ABSOLUTE PRESSURE Russian patent published in 2018 - IPC G01L1/10 

FIELD: measuring equipment.

SUBSTANCE: invention relates to the field of measuring technology, namely to devices for measuring the pressure of rarefaction. Claimed vibration frequency absolute pressure sensor comprises a cover with a fitting closing the housing within which the sensing element is disposed, a vibrating frequency element comprising a support base, a rectangular section resonator and a power transmission rod transmitting a force from the sensing element, and an electromagnetic system of excitation and removal of oscillations, consisting of an electromagnet-driver and an electromagnet-adapter and interacting with a terminal block with the current leads installed in it, the internal volume of the body is sealed, while the axis of symmetry of the vibrating frequency element coincides with the axis of symmetry of the resonator, in the axial direction enclosed between two additional masses, made with them for a single whole and interfaced with the support base through the elastic beam suspension, separated through an acoustic decoupling from sectors providing a combination of a vibrating frequency element with respect to the housing and the sensing element, the sensing element being made in the form of a diaphragm installed in the housing with the help of a clamp so that the axis of rotation of the diaphragm coincides with the axis of symmetry of the resonator, and the internal volume of the housing is evacuated.

EFFECT: technical result consists in increasing the accuracy of the conversion and increasing the sensitivity while maintaining the overall characteristics and a given level of reliability due to the arrangement of the resonator of the vibration frequency element perpendicular and coaxial to the plane of the diaphragm, made in the form of a flat membrane, as well as by introducing an acoustic isolation in the form of microscales into the design of the vibration frequency element, designed to reduce the energy losses of the mechanical vibrations of the resonator as a result of contact with the sensor housing.

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