VIBRATION FREQUENCY MICROMECHANICAL ACCELEROMETER Russian patent published in 2012 - IPC G01P15/10 

FIELD: measurement technology.

SUBSTANCE: accelerometer contains base plate (1) made of dielectric material, bearing elements (3) rigidly fixed on the support (1), inertia mass (2) located with the gap relative to base plate (1) and connected to the bearing elements (3) with elastic elements of the suspension (4). Additional mass (5) with elastic elements of the suspension (6) is located with the gap relative to the base plate (1) and its mass is significantly lesser than the mass of inertia mass (2). Vibrator (7) is located with the gap relative to the base (1) and is fixed on the one side to inertia mass (2) and on another side to additional mass (5). System for registration of inertia mass movements is made as electrostatic drive system - registering of vibrator oscillations that contains immovable electrodes (8) fixed on the base plate and moving electrode with vibrator using as such (7). The rigidity ratio of elastic elements of suspension of inertia mass in direction that is vertical relative to the base plate (1) is described by the equation: C₁≅C₂∙m₂/m₁, where C₁ and C₂ are the rigidity of elastic elements of suspension of inertia mass and additional mass in direction that is vertical relative to the base plate, this m1 is the mass of inertia mass, m₂ is the mass of additional mass.

EFFECT: increased precision of measurement.

1 dwg, 3 dwg