VIBRATION-FREQUENCY MICROMECHANICAL ACCELEROMETER Russian patent published in 2011 - IPC G01P15/97 G01C19/56 

FIELD: physics.

SUBSTANCE: vibration-frequency micromechanical accelerometer has a substrate (1) made from dielectric material, an inertial mass (2) with a centre hole (3), support element (4) and an additional support element (5), mounted on the substrate (1) and placed in the centre hole (3). The inertial mass (2) is linked to the support element (4) through elastic members (6). A resonator (7) is mounted on one side to the inertial mass (2) and on the other side to the additional support element (5), is a movable electrode and, together with fixed electrodes (8), is an oscillation exciting-pick up system.

EFFECT: accelerometer enables to measure the value of the current linear acceleration in the direction of axis X with high accuracy owing to a frequency-domain output signal and high Q-factor of oscillations of the resonator.

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