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2 664 685

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(51)

IPC

G01B11/06(2006-01-01)

(21) (22)

Application

2017116375, 2017-05-10

(24)

Start date

2017-05-10

(22)

Actual filing date

2017-05-10

(45)

Published

2018-08-21

(72)

Inventor

Ivanova Natalya AnatolevnaZykov Aleksandr Yurevich

(73)

Holder

Federalnoe Gosudarstvennoe Avtonomnoe Obrazovatelnoe Uchrezhdenie Vysshego Obrazovaniya Gosudarstvennyj Universitet"

METHOD OF MEASUREMENT OF THIN FILM COATING THICKNESS ON THERMAL CONDUCTING BASES Russian patent published in 2018 - IPC G01B11/06

Abstract RU 2664685 C1

FIELD: measuring equipment.

SUBSTANCE: invention relates to the field of instrumentation and relates to a method for measuring the thickness of a thin film coating on a thermally conductive substrate. Method includes applying a thin layer of clear liquid to the coating and local heating of the coating with a laser beam. Thermocapillary convection is built up in the liquid layer in the heating zone, leading to deformation of the free surface of the liquid in the form of a thermocapillary depression, the dimensions of which depend on the thickness of the coating. Thickness of the coating is determined from the diameter of the interference pattern formed on the screen by the test beam of the laser reflected from the thermocapillary deepening.

EFFECT: technical result is simplified measurement process.

1 cl, 3 dwg

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RU 2 664 685 C1

Authors

Ivanova Natalya Anatolevna

Zykov Aleksandr Yurevich

Dates

2018-08-21—Published

2017-05-10—Filed