METHOD OF MEASURING TEMPERATURE OF SUBSTRATE Russian patent published in 2007 - IPC G01K11/00 

Abstract RU 2308008 C1

FIELD: measuring technique.

SUBSTANCE: method comprises using a contact pickup that is introduced into the substrate in the zone of incidence of the laser beam inducing the thermo-capillary convection in the liquid layer.

EFFECT: enhanced reliability.

2 dwg

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RU 2 308 008 C1

Authors

Bezuglyj Boris Anatol'Evich

Fljagin Viktor Mikhajlovich

Ivanova Natal'Ja Anatol'Evna

Dates

2007-10-10Published

2006-03-27Filed