MEASURING DEVICE OF GEOMETRIC PARAMETERS OF OBJECTS Russian patent published in 2018 - IPC G01B11/06 G01B9/02 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measuring equipment, namely to equipment for measuring thickness of films and coatings. Device implements frequency-pressure-wave interference method for measuring thickness, according to which guidance on the coating surface and on the boundary of the coating with base is made by interference in infrared spectrum and measurement of thickness, is made by frequency method. Optical arrangement of the device is based on optic fiber technology and realizes measurements of frequency of light pulses, formation of which occurs in light pulse generator realized in the circuit. Thickness of the coating h is determined from measurement of frequencies of the light pulses F₁ and F₂, formed in generator when radiation is guided sequentially on the surface of the coating and on the boundary of the coating with base, in accordance with the formula h = c(F₂ – F₁) / 2nF₁F₂, where c is speed of light, n is refraction index of medium.

EFFECT: technical result is an increase in the resolution enhancement and accuracy of measurements.

1 cl, 1 dwg