POWER DISTRIBUTOR FOR DEFINED SEQUENTIAL POWER DISTRIBUTION Russian patent published in 2018 - IPC H01J37/34 

FIELD: electricity.

SUBSTANCE: invention relates to a power distributor that is capable of distributing a high power from a DC generator to more than two targets sequentially and without the power output of the DC generator being interrupted. Power distributor is configured to distribute the substantially constant power of the DC generator to more than two targets (A, B, C, ..., X) of a coating unit sequentially and without the power output being interrupted, wherein the power distributor comprises a circuit connecting an output of the DC generator with all more than two targets (A, B, C, …, X), and the other output of the DC generator after a first ohmic resistor (R_T) at the branch point branches in accordance with the number of targets. Each target (A, B, C, ..., X) is connected to one of the branches, and the branches contain one target relative to a first switch, respectively (S_A, S_B, S_C … S_X), by means of which a line leading to the related target can be stopped. Second ohmic resistor (R_D) with a connected DC generator via a second switch (S_D) is connected in parallel to more than two targets (A, B, C, …, X) and the first ohmic resistor (R_T) to the outputs of the direct current generator and is designed to provide power drainage, especially during the power recovery interval and / or arc formation. In addition, the invention relates to an ion sputter source comprising the power generator described above.

EFFECT: technical result is an increase in the operating reliability of the target.

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