METHOD OF HOMOGENEOUS APPLYING HIPIMS COATINGS Russian patent published in 2017 - IPC H01J37/34 

FIELD: physics.

SUBSTANCE: method for physical applying a gas phase coating by spraying in an evacuated coating chamber includes the following steps: a) preparing a generator with a predetermined constant output power, preferably, at least, after the connection and at the end of the power increase interval, b) connecting the generator, c) connecting the first partial cathode to the generator so that the generator power is supplied to the first partial cathode, d) detaching the generator from the first partial cathode at the end of the set first high power pulse interval corresponding to the first partial cathode; e) attaching the second partial cathode to the generator so that the generator power is supplied to the second partial cathode; f) detaching the generator from the second partial cathode at the end of the predetermined second high power pulse interval corresponding to the second partial cathode. Partial cathodes are provided for the height of the coating chamber, and the duration of the first high power pulse interval is matched to the duration of another high power pulse interval such that the layer formed by the coating has a predetermined thickness distribution of the layers along the height of the coating chamber.

EFFECT: increasing the effectiveness of coating a part.

13 cl, 1 dwg