FIELD: electricity.
SUBSTANCE: invention relates to a method of providing power pulses for a PVD-sputtered cathode that comprises a power receiving component and a partial cathode. During the power-up interval of the generator, the power in the power reception component is reduced, and then the power is reduced at the partial cathode. Switching is carried out in such a way that the power output from the generator providing power should not be interrupted.
EFFECT: simplifying the change in the duration of power pulses in large internals.
6 cl, 3 dwg
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