GAS SENSOR, A CHEMORESISTIVE TYPE MULTI-SENSOR RULER BASED ON OXIDIZED TWO-DIMENSIONAL TITANIUM CARBIDE (MXene) AND A METHOD FOR PRODUCTION THEREOF Russian patent published in 2019 - IPC G01N27/12 B82B1/00 B82Y40/00 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to the field of sensor equipment and nanotechnology, in particular to development of used for the gases detection chemoresistive type gas sensors. Method of making gas sensor includes synthesis of structures of two-dimensional titanium carbide Ti₃C₂T_x (MXene), where T_x= O^-, OH^-, F^- and their application on dielectric substrate equipped with coplanar measuring electrodes, followed by annealing at temperature of 350 °C for oxidation of MXenes in order to form non-stoichiometric surface layer of titanium dioxide. If the sensor substrate is equipped with a set of coplanar electrodes in an amount of more than three, a multi-sensor line of chemoresistive type can be formed, the vector signal of which after processing by pattern recognition methods enables selective distinction of test gas mixtures.

EFFECT: invention provides the possibility of producing a high-sensitivity gas sensor of chemoresistant type.

12 cl, 8 dwg