TITANIUM SULFIDE WHISKERS BASED CHEMORESISTIVE TYPE GAS SENSOR AND ITS MANUFACTURING METHOD Russian patent published in 2019 - IPC G01N27/12 

FIELD: physics.

SUBSTANCE: invention relates to the field of sensor equipment and nanotechnology, in particular to development of used for the gases detection chemoresistive type gas sensors. Titanium sulfide whiskers based chemoresistive gas sensor manufacturing method consists in that the titanium foil and sulfur powder mixture is prepared, in which the mass of sulfur exceeds the mass of titanium in a ratio of at least 1:1.8 by weight, heating this mixture in the sealed vacuum quartz ampoule and synthesizing the TiS₃ whiskers, at that, whiskers are distinguished by the geometrical dimensions large aspect ratio, TiS₃ whiskers are applied on the dielectric substrate containing metal electrodes, which have ohmic contact with the TiS₃ whiskers.

EFFECT: invention enables ability of operating at room temperature gas sensor development.

9 cl, 6 dwg, 1 ex