FIELD: measurement; testing.
SUBSTANCE: disclosed group of inventions relates to interference sensors, as well as to methods of measurement using these sensors. Said sensor comprises a sensing element, by means of which a measured value induces a relative phase shift between two waves, at least one detector measuring the interference signal between two waves, and additionally includes a phase shift detection unit having, as an input signal, an interference signal and determining a first measure, which is the principal value (ϕ, 13) of the relative phase shift, and a contrast detection unit having, as an input signal, an interference signal, for determining a second measure (A, 12), which is a cross-correlation between two waves, and a processing unit for converting the first and second measures to value (x) of the measured value. Corresponding measurement method is implemented using the described sensor.
EFFECT: present group of inventions is aimed at eliminating the periodic ambiguity of measurements.
21 cl, 9 dwg
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Authors
Dates
2019-01-15—Published
2015-02-19—Filed