METHOD OF PRODUCING ORGANO-INORGANIC LAMINAR MATERIALS Russian patent published in 2019 - IPC C23C16/455 

FIELD: technological processes.

SUBSTANCE: invention relates to methods of producing organo-inorganic layered materials by atomic layer deposition. Method of producing organo-inorganic laminar material involves movement of the substrate relative to at least two separate openings arranged along a relatively movable trajectory. At least through one hole organic compound in gaseous state is passed in direction of substrate surface and at least through one more hole is passed (semi) metal-containing compound in gaseous state in direction of substrate surface, wherein there are more holes through which the (metal) containing compound is passed, than the holes through which the organic compound is passed, and in which the holes are installed on the rotating drum.

EFFECT: invention enables to produce large laminates at high speed and high degree of homogeneity, having flexibility, a barrier to diffusion of small molecules and protective properties during bending.

12 cl, 1 ex, 1 dwg