METHOD OF PRODUCING FLEXIBLE ORGANIC-INORGANIC LAMINAR MATERIALS Russian patent published in 2020 - IPC C23C16/455 H01L51/54 

FIELD: manufacturing technology.

SUBSTANCE: disclosed group of inventions relates to the production of flexible laminates containing organic and inorganic layers, to protective films containing said materials, use of said protective films and to electronic devices containing said protective film. Method of producing a laminated material for a protective passivating film comprises depositing an inorganic layer by depositing atomic layers and depositing an organic layer containing selenium by depositing molecular layers. In particular cases of implementing the invention, selenol, diselenol or aromatic selenol is used to deposit the organic layer. For deposition of inorganic layer compound containing Al is used. Laminar material for the protective passivating film comprises an inorganic layer and an organic layer containing selenium, wherein inorganic layer contains AlO_x(OH)_y, wherein 0≤x≤1.5, 0≤y≤3 and 2x+y=3.

EFFECT: production of a film with high water and oxygen protection properties, wherein said film retains its protective properties under conditions of high mechanical loads and has high resistance to decomposition in a humid atmosphere at high temperatures.

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