METHOD OF PRODUCING FLEXIBLE ORGANIC-INORGANIC LAMINAR MATERIALS Russian patent published in 2020 - IPC C23C16/455 H01L51/54 

FIELD: manufacturing technology; technological processes.

SUBSTANCE: present invention relates to production of flexible laminar materials containing organic and inorganic layers, protective films, containing said laminar materials for sealing, packaging, or passivation and to electronic devices containing protective films. Method of making laminar material comprises performing at least twice sequence of operations, involving deposition of an inorganic layer by carrying out 3–150 cycles of deposition of atomic layers, and depositing an organic layer containing an aromatic compound with an amino- and hydroxyl group, by performing 1–3 cycles of molecular layers deposition process. Said inorganic layer has thickness of 0.3–15 nm. Said organic layer features thickness of 0.1–3 nm.

EFFECT: production of films with high protective properties of water and oxygen, which retain their properties under conditions of high mechanical load, for example, bending, and have high resistance to decomposition in a humid atmosphere at high temperatures.

15 cl, 4 dwg, 1 tbl, 8 ex