METHOD OF MEASURING ELECTROCONDUCTIVITY OF THIN METAL FILMS Russian patent published in 2019 - IPC G01N27/90 G01R27/02 

FIELD: monitoring and measuring equipment.

SUBSTANCE: invention relates to control and measurement equipment and can be used for contactless measurement of specific electrical conductivity of thin metal films with thickness of 0.05–5 mcm. Method of measuring electrical conductivity of thin films is an estimate of the averaged amplitude of the signal of an eddy-current converter using a measuring system, which is a software and hardware system, which includes a personal computer and software, as well as generation, amplification and filtration units. According to the invention, two eddy current converters are used, wherein signal control on exciting windings of eddy current converters and reception of signals from measuring windings of eddy current converters is carried out using a microcontroller, which enables to generate a signal, and the software additionally includes generation and filtration frequency task units; wherein signals C1 and C2 from measuring windings, which carry information on the state of the analysed material, are subjected to amplification and filtration and are transmitted to the analogue-to-digital converter and the amplitude detector, and then go to the signal processing software unit, and then displayed on the monitor of the personal computer, wherein the signal C1 from the measuring winding of the first converter corresponds to the signal from the substrate, and the signal C2 from the measuring winding of the second converter corresponds to the signal from the thin metal film, wherein generation frequency and filtration frequency control is carried out synchronously by communication of generation software unit and filtration unit controlled by filtration software unit, and electric conductivity f(x) of thin metal film is found from equation f(x)=0.0809x–0.3696, where x is amplitude difference between two signals C1 and C2.

EFFECT: invention provides reduced measurement error of electroconductivity of thin films having low reflection coefficient by using an eddy current method with subsequent hardware and software processing, which enables to perform mathematical processing of the received signal.

1 cl, 3 dwg, 1 tbl