METHOD OF MONITORING ELECTRON-BEAM TECHNOLOGY OF SURFACE ALLOYING AND THERMAL TREATMENT IN VACUUM CHAMBERS Russian patent published in 2019 - IPC G01H1/14 

FIELD: machine building.

SUBSTANCE: essence of the invention lies in the fact that the method of monitoring structural, phase and chemical transformations in the near-surface layer of treated objects in vacuum chambers under the effect of electron-beam pulses additionally comprises steps, on which a flexible wire is used as a waveguide, an accelerometer with a frequency characteristic, which covers a frequency range of up to 100 kHz, is used as a vibration sensor, during dependence of an electron beam pulse, dependences of current effective values of signals, coming from accelerometer, from time in two frequency ranges until signal amplitude falls to level of background noise, octave band with highest effective value of signal amplitude and neighbouring higher high frequency octave is selected as frequency bands, obtained time dependences of effective values of signals are compared with experimentally obtained reference relationships, and based on the results of comparison, the electron-beam pulse energy is sufficient or the result of phase conversion is sufficient.

EFFECT: technical result is higher accuracy of adjusting equipment, providing efficiency of electron-beam processing.

1 cl, 4 dwg