METHOD FOR RAPID ASSESSMENT OF RESULTS OF ELECTRON-BEAM THERMAL ACTION ON OBJECTS IN A VACUUM CHAMBER Russian patent published in 2019 - IPC C23C14/32 C23C14/56 G01N29/00 

FIELD: monitoring systems.

SUBSTANCE: invention relates to a method of monitoring structural, phase and chemical transformations in a near-surface layer of treated objects in vacuum chambers under the effect of electron-beam pulses and can be used to increase reliability and durability of wide range of parts of machines. Waveguide is connected to the processed object, it is taken outside the limits of the vacuum chamber through a vacuum input and a vibration sensor is fixed on the waveguide. Information is processed using a computer. Waveguide used is a flexible wire, the vibration sensor used is an accelerometer with a frequency characteristic covering the frequency range up to 100 kHz. During electron beam pulse action, dependences of current effective values of signals coming from accelerometer are recorded from time in two frequency ranges till moment of signal amplitude drop to level of background noise. As the frequency ranges the octave band with the highest effective signal amplitude value and the neighboring higher high frequency octave is selected, the time period "T" is determined, during which the signal amplitude exceeded the background value, calculating the effective value of signal "A" on entire period "T", estimating energy "U" of signal by formula: U=A²T (1) and the value "U" determine the electron-beam pulse energy adequacy and the results of phase transformations.

EFFECT: high accuracy of tuning equipment, which determines parameters of pulses of an electron beam acting on an object.

1 cl, 4 dwg, 1 ex