METHOD OF IMPLEMENTATION AND DEVICE OF SENSITIVE ELEMENT FOR CONTROL OF MOTION PARAMETERS IN A MULTILEVEL MULTICHIP MODULE Russian patent published in 2019 - IPC G01P15/09 

FIELD: electrical engineering.

SUBSTANCE: use for the accelerometer piezoelectric sensor element assembly manufacturing. Summary of invention consists in the fact that device is a multi-crystal module, comprising several boards with electric elements and interposers arranged on them, note here that sensitive piezoelectric cell is arranged on flexible board and physically located in the center of through metallized holes of all boards of multi-crystal module. Self-sensitive element is located on flexible board, in which U-shaped slot is made, i.e. board is connected to module housing only on one side. To eliminate parasitic oscillations, a rigid plate is glued to the lower part of the board under the sensitive element.

EFFECT: higher accuracy of measurements by means of accelerometer at control of linear acceleration and speed at acceleration stage of highly dynamic object.

6 cl, 17 dwg