FIELD: chemistry.
SUBSTANCE: present invention relates to novel metal complexes containing at least one N-aminoguanidine ligand, where said metal complex has formula 1a or 1b
given below. M is a metal selected from a group comprising metals of Groups 1–15 of the Periodic Table of Elements (PTE), lanthanides or actinides, R1 - hydrogen or cyclic, linear or branched alkyl radical containing up to 5 carbon atoms, NH2, NH(CH3), N(CH3)2, N(C2H5)2 or N-pyrrolidinyl, or R1 and R2 together with nitrogen atom, to which they are attached, form pyrrolidinyl ring; R2 - hydrogen or cyclic, linear or branched alkyl radical containing up to 5 carbon atoms, NH2, N(CH3)2, N(C2H5)2, or R2 and R1 together with nitrogen atom, to which they are attached, form pyrrolidinyl ring; R3 - hydrogen or cyclic, linear or branched alkyl radical containing up to 8 carbon atoms, NH2, NH(CH3), N(CH3)2, N(C2H5)2 or N-pyrrolidinyl, or SiMe3 group, R4 and R5 independently of each other, denote hydrogen or a linear or branched alkyl radical containing up to 4 carbon atoms, or R4 and R5 together with nitrogen atom, to which they are attached, form pyrrolidinyl ring; X is a monoanionic soligand selected from a hydride anion (H-), from a group comprising halides, from a group comprising cyclic, linear or branched alkyls containing up to 8 carbon atoms, from a group comprising substituted or unsubstituted arylides or heteroarylides containing up to 10 C atoms, from a group comprising alkoxylate ligands, from a group comprising alkylthiolate or alkyl selenate ligands, or from a group comprising secondary amide ligands, Y - dianionic solagand selected from an oxo group [O]2-, sulphide group [S]2- or imide group [NR6]2-, where R6 - cyclic, branched or linear alkyl containing up to 8 carbon atoms, or substituted or unsubstituted aryl containing up to 20 carbon atoms, L is a neutral ligand, which is donor of 2 electrons, and is an integer equal to 1 to 4, and n, m and p are each independently equal to 0, 1, 2, 3 or 4, provided that the value of M is other than copper, if R3 denotes NH2, R1, R2, R4 and R5 denote hydrogen, X denotes chloride and n equals 3. Also disclosed is a method of producing a metal complex and use thereof.
EFFECT: novel metal complexes are suitable for use as precursors in deposition of thin films from gas phase, such as CVD, MO-CVD, MOVPE and ALD.
26 cl, 4 dwg, 11 ex
