METHOD OF APPLYING ION-PLASMA COATINGS ON STATOR SEMI-RING WITH BLADES AND INSTALLATION FOR ITS IMPLEMENTATION Russian patent published in 2019 - IPC C23C14/32 C23C14/16 H01J37/36 

FIELD: technological processes.

SUBSTANCE: invention relates to method of application of ion-plasma coatings on stator semi-ring with blades and installation for its implementation. Method includes arrangement of semi-rings in vacuum chamber of installation on item holder, ion cleaning of surface of semi-rings with blades and application of coating on them with electric arc evaporation of material of at least two vertically arranged extended cathodes. Extended cathodes are located in the vacuum chamber center by evaporation surfaces outside, and the semi-rings are placed one above the other around the cathodes in the peripheral part of the vacuum chamber with the longitudinal axes of the cylindrical surface of the semi-rings vertically. During the application of the coating, the semi-rings are brought into angular oscillations, inclining them to 45 angular degrees on both sides of the vertical line and simultaneously rotating and / or bringing said semi-rings into a reciprocal-oscillatory motion relative to the vertical axis of the vacuum chamber of the apparatus.

EFFECT: disclosed is a method of applying ion-plasma coatings.

10 cl, 3 dwg