METHOD OF PRODUCING SILICON COMPOSITE MATERIAL AND DEVICE FOR PRODUCING SILICON COMPOSITE MATERIAL Russian patent published in 2020 - IPC C01B32/977 C04B35/565 

Abstract RU 2714070 C1

FIELD: chemistry.

SUBSTANCE: invention can be used in chemical industry. Method of producing composite material based on silicon carbide involves the steps of: holding a silicon carbide preform in a reaction furnace; supplying a feed gas containing methyltrichlorosilane into a reaction furnace for impregnating the preform with silicon carbide; controlling and reducing the temperature of the gas discharged from the reaction furnace at a given rate.

EFFECT: proposed group of inventions provides reduced formation of liquid or solid by-product from gas.

41 cl, 6 ex, 52 dwg, 3 tbl

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RU 2 714 070 C1

Authors

Fukushima, Yasuyuki

Akazaki, Kozue

Tanaka, Yasutomo

Akikubo, Kazuma

Nakamura, Takeshi

Shimogaki, Yukihiro

Momose, Takeshi

Sato, Noboru

Shima, Kohei

Funato, Yuichi

Dates

2020-02-11Published

2017-07-04Filed