OPTOMECHANICAL VIBRATION MICRO-SENSOR Russian patent published in 2020 - IPC G01B9/02 

FIELD: physics.

SUBSTANCE: invention relates to micro-optoelectromechanical systems or optical MOEMS systems, more specifically to miniature inertial (vibration) optical sensors using MOEMS systems. Disclosed is an optomechanical vibration micro-sensor which is fully integrated into a silicon substrate with an optical circuit for reading interference type, with a planar structure based on silicon oxynitride waveguides, wherein micro sensor design consists of waveguide Mach-Zehnder interferometer, one of arms of which is located along cantilever perimeter, the other shoulder on substrate. Oscillations of the cantilever cause change in the length of the optical waveguide due to deformation of the layer in which the waveguide is located. Changing the length of one arm of the interferometer results in a change in the phase ratio of waves summed at the output communication element. Communication element in the interferometer at the input and output can be directional couplers (connected waveguides) or multimode communication devices. Difference in intensity of light flux between two waveguides in arms of interferometer is proportional to acceleration in wide range of amplitudes and allows interferometer to detect mechanical displacement.

EFFECT: simplified design, increased reliability, sensitivity and possibility of operation under severe environmental conditions (strong electromagnetic fields and high temperature).

1 cl, 2 dwg