PLANAR ELECTRO-OPTICAL LIGHT MODULATOR BASED ON THE FIELD EFFECT OF EXCITATION OF ANGULAR PLASMONS IN A HYBRID WAVEGUIDE Russian patent published in 2022 - IPC G02F1/25 G02B6/12 

FIELD: optical technology.

SUBSTANCE: planar electro-optical light modulator contains a single-mode or widened multimode silicon waveguide, on the surface of which a thin layer of transparent conductive oxide is applied, on the surface of which a dielectric layer is applied, having a protrusion located symmetrically relative to the longitudinal axis of the dielectric layer. The upper and lower electrodes are made of metal and separated by an insulator. The lower electrode contacts the surface of the transparent conductive oxide layer and is displaced from the optical axis of the waveguide, and the upper electrode surrounds the dielectric protrusion and does not come into contact with the surface of the conductive oxide layer. The change in the characteristics of the light wave passing through the hybrid plasmon waveguide is achieved due to the interaction of the plasmon and waveguide modes under the action of the applied control voltage.

EFFECT: increase in the frequency band of modulation and control of the intensity of light with TE polarization.

5 cl, 9 dwg