CASCADE SEMICONDUCTOR DETECTOR FOR GAS CHROMATOGRAPHY Russian patent published in 2021 - IPC G01N30/62 

FIELD: chemistry.

SUBSTANCE: invention relates to analytical chemistry and specifically to gas chemistry. Cascade semiconductor detector for gas chromatography comprises a sensitive element made in the form of semiconductor resistors applied on a silicon substrate, thermostated by means of a planar metal resistor deposited on the back side of the substrate, sensitive element is made in the form of several series-arranged sensitive elements, selective to different types of gases, wherein the sensitive element is installed in the fluoroplastic body with holes, which is fixed with the possibility of supply and removal of the eluate from the chromatographic separating column.

EFFECT: high sensitivity of measurement and expansion of a number of substances analyzed using gas chromatography.

1 cl, 1 dwg