FIELD: chemistry.
SUBSTANCE: disclosed gas analyser has a semiconductor base made from a polycrystalline film of indium antimonide doped with zinc telluride, deposited on the electrode pad of a piezoelectric crystal resonator which serves as the substrate.
EFFECT: increased sensitivity of the sensor and its manufacturability.
3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SEMICONDUCTOR GAS SENSOR OF AMMONIA TRACE IMPURITIES | 2015 |
|
RU2607733C1 |
| GAS ANALYSER OF CARBON OXIDE | 2009 |
|
RU2395799C1 |
| NANO-SEMICONDUCTOR GAS ANALYSER | 2010 |
|
RU2423688C1 |
| SEMICONDUCTOR GAS ANALYSER | 2011 |
|
RU2469300C1 |
| SEMICONDUCTOR AMMONIA TRACE CONTAMINATION SENSOR | 2015 |
|
RU2589455C1 |
| SEMICONDUCTOR GAS SENSOR OF TRACE OXYGEN MICRO IMPURITIES | 2019 |
|
RU2710523C1 |
| SEMICONDUCTOR GAS SENSOR OF TRACE IMPURITIES OF OXYGEN | 2015 |
|
RU2603337C1 |
| SEMICONDUCTING GAS ANALYSER | 2007 |
|
RU2350936C1 |
| NITROGEN DIOXIDE INDICATOR | 2004 |
|
RU2274853C1 |
| SEMICONDUCTOR GAS SENSOR FOR OXYGEN TRACE SUBSTANCES | 2015 |
|
RU2610349C1 |
