FIELD: gas analysis.
SUBSTANCE: invention relates to gas analysis and can be used for environmental monitoring tasks. Disclosed is a semiconductor sensor of nitrogen dioxide, consisting of a semiconductor base made in form of a polycrystalline film of zinc selenide (ZnSe), which is deposited on a non-conductive substrate.
EFFECT: sensor according to the invention with considerable simplification of its manufacturing technology enables to determine content of nitrogen dioxide with sensitivity several times higher than that of known sensors.
1 cl, 2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SOLID STATE NITROGEN DIOXIDE SENSOR | 2021 |
|
RU2774643C1 |
| NITROGEN DIOXIDE SENSOR | 2020 |
|
RU2745943C1 |
| NITROGEN DIOXIDE GAS ANALYZER | 2019 |
|
RU2724290C1 |
| SEMICONDUCTOR NITROGEN DIOXIDE SENSOR | 2020 |
|
RU2750854C1 |
| SEMICONDUCTOR NITROGEN DIOXIDE ANALYSER | 2014 |
|
RU2561019C1 |
| SEMICONDUCTOR GAS ANALYZER OF CARBON OXIDE | 2017 |
|
RU2666576C1 |
| SEMI-CONDUCTOR GAS ANALYSER OF CARBON MONOXIDE | 2014 |
|
RU2548049C1 |
| SEMICONDUCTOR GAS SENSOR OF TRACE OXYGEN MICRO IMPURITIES | 2019 |
|
RU2710523C1 |
| SEMICONDUCTOR GAS ANALYSER | 2013 |
|
RU2526226C1 |
| CARBON MONOXIDE SENSOR | 2020 |
|
RU2733799C1 |
