METHOD AND SYSTEM FOR ALIGNING IMAGES OF SAMPLE LAYERS OBTAINED USING A SCANNING ELECTRON MICROSCOPE WITH A FOCUSED ION BEAM Russian patent published in 2021 - IPC G06T19/20 G06T5/50 G06T15/08 G06K9/70 H01J37/285 

FIELD: image processing means.

SUBSTANCE: invention relates to image processing methods and is intended for alignment of images of layers obtained using a scanning electron microscope with a focused ion beam for subsequent construction of a three-dimensional model of the sample. Disclosed is a method of aligning images of sample layers obtained using a scanning electron microscope with a focused ion beam. According to the method, a sequence of images of layers composing a three-dimensional image of the sample is obtained by means of a scanning electron microscope with a focused ion beam. Obtained images of layers are successively displayed on the display device and the image of the layer images relative to each other is determined. Based on the nature of displacement of images of layers, type of transformation of one of images of adjacent layers is selected, which provides alignment of images of adjacent layers.

EFFECT: technical result is alignment of images of layers of the sample, obtained using a scanning electron microscope with a focused ion beam without significant geometric distortion.

6 cl, 6 dwg