FIELD: images processing means.
SUBSTANCE: invention relates to scanning electron microscopy. This invention uses the principle of photogrammetric processing of images obtained in a scanning electron microscope at various inclination angles the test sample. Summary of the invention: an island film is formed on the surface of the test sample, creating a contrast in the image, and the results of photogrammetric image processing are adjusted based on individual island heights determined on a flat surface area.
EFFECT: increased accuracy of the results of three-dimensional reconstruction.
1 cl, 5 dwg
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