FIELD: power electronics.
SUBSTANCE: invention relates to methods for producing electrical insulation coatings on metal substrates when producing power hybrid integrated circuits (hereinafter – PHIC) for power electronics devices. Producing of an electrical insulation coating includes preparation of a metal substrate, application of an electrical insulation metal layer, etching of the substrate with an aqueous solution of alkali and chemical polishing with a mixture of mineral acids. Then, a layer of aluminum oxide with a thickness of 45 to 55 mcm is formed on a metal substrate of an aluminum base by porous anodizing on a plant for growing aluminum oxide layers in an aqueous solution of oxalic acid with a concentration of at least 5% in galvanostatic mode at a solution temperature of 15 to 17ºC, using certain materials and parameters.
EFFECT: invention provides an improvement in dielectric characteristics of aluminum oxide layer, which is the main functional non-conductive layer on an aluminum base, which is a structure base for PHIC.
1 cl, 1 ex, 2 dwg
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Authors
Dates
2021-04-23—Published
2020-03-02—Filed