METHOD FOR MANUFACTURING A FLEXIBLE HUMIDITY SENSOR Russian patent published in 2022 - IPC G01N27/04 

FIELD: measuring equipment.

SUBSTANCE: invention can be used in manufacture of a wide range of flexible electronic equipment and articles, in particular, resistive-type humidity sensors. The method for manufacturing a flexible humidity sensor includes creating a multigraphene film on a flexible substrate, whereon an electrically conductive structure is formed, wherein a fabric segment is used as a flexible substrate, pretreated with an adhesive composition, wherefor the fabric is impregnated in the solution of an adhesive composition, e.g., an aqueous solution of bovine serum albumin, and dried at room temperature until a constant mass is obtained, e.g., for 18±1 hours, followed by depositing layers of graphene oxide on the surface of the substrate by dipping the substrate with the adhesive layer in an aqueous suspension of graphene oxide, previously subjected to ultrasonic impact, and subsequently drying at room temperature until a constant mass is obtained, e.g., for no less than 12 hours, and the multigraphene film is reduced in vapours of hydrazine hydrate in a sealed container at a temperature of 60±5°C for 60±10 minutes, followed by drying at room temperature until a constant mass is obtained, e.g., for no less than 12 hours. Finally, an electrically conductive structure is formed on the surface of a multigraphene film by applying leads based on a conductive paste, e.g., silver paste, followed by drying at room temperature for no less than 24 hours.

EFFECT: invention provides a possibility of creating a reliable and stable resistive-type sensor based on a graphene film, exhibiting flexible properties.

3 cl, 2 dwg