METHOD OF MAKING THIN-FILM HUMIDITY SENSOR Russian patent published in 2019 - IPC G01N27/00 B82B1/00 

Abstract RU 2682259 C1

FIELD: physics.

SUBSTANCE: invention can be used to form electroconductive structures on a polymer film. Essence of the invention is that the method of manufacturing a thin-film humidity sensor of the resistive type is based on making electroconductive structures on a flexible polymer film. For this purpose, a film of graphene oxide is formed on the surface of the polymer substrate by depositing an aqueous suspension of graphene oxide and subsequent drying thereof. Further, on the surface of the prepared polymer substrate, an electroconductive track of electrodes is irradiated by means of a semiconductor laser.

EFFECT: disclosed is a method of making a resistive-type thin-film moisture sensor.

3 cl, 1 dwg

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RU 2 682 259 C1

Authors

Vinokurov Pavel Vasilevich

Filippov Ivan Mikhajlovich

Alekseev Ajyyskhan Ivanovich

Kapitonov Albert Nikolaevich

Smagulova Svetlana Afanasevna

Dates

2019-03-18Published

2018-06-01Filed