FIELD: physics.
SUBSTANCE: invention can be used to form electroconductive structures on a polymer film. Essence of the invention is that the method of manufacturing a thin-film humidity sensor of the resistive type is based on making electroconductive structures on a flexible polymer film. For this purpose, a film of graphene oxide is formed on the surface of the polymer substrate by depositing an aqueous suspension of graphene oxide and subsequent drying thereof. Further, on the surface of the prepared polymer substrate, an electroconductive track of electrodes is irradiated by means of a semiconductor laser.
EFFECT: disclosed is a method of making a resistive-type thin-film moisture sensor.
3 cl, 1 dwg
Title | Year | Author | Number |
---|---|---|---|
METHOD FOR MANUFACTURING A FLEXIBLE HUMIDITY SENSOR | 2021 |
|
RU2764380C1 |
METHOD FOR FORMING ELECTRICALLY CONDUCTIVE LAYERS AND STRUCTURES OF VARIOUS CONFIGURATIONS FROM FLAKES OF REDUCED GRAPHENE OXIDE (MULTIGRAPHENE) | 2022 |
|
RU2794890C1 |
METHOD OF ANUFACTURING A MATRIX BIOSENSOR BASED ON REDUCED GRAPHENE OXIDE AND A MATRIX BIOSENSOR ON A POLYMER SUBSTRATE | 2019 |
|
RU2745663C1 |
METHOD OF PRODUCING A BIOLOGICAL SENSOR BASED ON GRAPHENE OXIDE AND A BIOLOGICAL SENSOR ON A FLEXIBLE SUBSTRATE | 2018 |
|
RU2697701C1 |
METHOD FOR MANUFACTURING FLEXIBLE STRAIN SENSOR | 2023 |
|
RU2811892C1 |
GAS ANALYSIS MULTI-SENSOR CHIP BASED ON GRAPHENE AND METHOD OF ITS MANUFACTURING | 2021 |
|
RU2775201C1 |
RESISTIVE MEMORY ELEMENT | 2019 |
|
RU2714379C1 |
GAS ANALYTICAL MULTISENSOR CHIP BASED ON PHOSPHORYLATED GRAPHENE AND METHOD FOR ITS MANUFACTURE | 2023 |
|
RU2814054C1 |
Gas sensor and gas analysis multisensor chip based on graphene functionalized with carbonyl groups | 2020 |
|
RU2745636C1 |
GAS DETECTOR BASED ON AMINATED GRAPHEN AND METAL OXIDE NANOPARTICLES AND METHOD FOR ITS MANUFACTURE | 2021 |
|
RU2776335C1 |
Authors
Dates
2019-03-18—Published
2018-06-01—Filed