METHOD OF MAKING MOISTURE SENSOR Russian patent published in 2016 - IPC G01N27/00 B82B1/00 

FIELD: nanotechnology.

SUBSTANCE: invention relates to use of graphene (multi-graphene) and can be widely used for manufacturing of resistive type humidity sensors used in radio engineering, electronic industry, power engineering and agriculture. Method of producing moisture sensor comprises depositing a multi-graphene film on copper foil. Then cut from blank sensor required shape and size to places of location of contacts at blank is glued glass substrate and a protective layer is applied on top of required shape. Foil from unprotected areas is then stripped, washed and workpiece is dried, as well as protective layer is removed with electric contacts.

EFFECT: technical result is easy manufacturing of sensor, high accuracy and stability of operation, linear characteristic of sensor, as well as high reliability.

1 cl, 2 dwg