DEVICE FOR PRODUCTION OF THIN METAL FILMS WITH THERMAL ENERGY OF SELF-DISTRIBUTING HIGH-TEMPERATURE SYNTHESIS IN GROUND CONDITIONS AND IN WEIGHTLESSNESS CONDITIONS Russian patent published in 2022 - IPC C23C14/24 C23C14/14 C23C14/56 C23C14/54 C23C14/52 

FIELD: microelectronics.

SUBSTANCE: invention relates to microelectronics, in particular to the field of production of thin metal films. A device for the production of thin metal films with thermal energy of self-distributing high-temperature synthesis (hereinafter – SHS) contains vacuum operating chamber 1, evaporator 4, in which there is evaporated material 5, a container for SHS charge, a source of a short-term heat impulse, substrates 8, heater 9 of substrates 8, flap 7 for overlapping a flow of particles of evaporated material 5, located between evaporator 4 and substrates 8, and means for the creation of vacuum in the operating chamber. In this case, the container for SHS charge is made in the form of tungsten cylinder 2 filled with inert gas in normal atmospheric conditions, in which pressed SHS charge 3 and tungsten spirals 6 are installed for initiating the short-term heat impulse. In the upper part, cylinder 2 is tightly closed with a tungsten cover with a concave cavity in the form of a boat, which is simultaneously evaporator 4. Flap 7 is fixed on a rod installed on the base of vacuum chamber 1. At the same time, evaporator 4 with evaporated material 5 and substrates 8 are under conditions of high vacuum.

EFFECT: production of thin films without outer heating source both in ground conditions and weightlessness conditions.

3 cl, 2 dwg, 3 ex