DEVICE CONTROL SYSTEM WITH MEMORY EFFECT FORMS FOR MANIPULATION OF MICRO- AND NANO-OBJECTS Russian patent published in 2022 - IPC B81B7/02 B82B3/00 

FIELD: control systems.

SUBSTANCE: invention relates to a control system for a device with an ECZ for manipulating micro- and nano-objects. The system contains a microwire with a base and an end made conical and sharpened by electrochemical etching, on which a device with an ECZ for manipulating micro- and nanoobjects is fixed, a working field with a manipulated object and a heating source, while the base of the microwire is fixed on a nanopositioner, and the heating source is made in the form of a small-sized resistive heating element located in thermal contact with the microwire, and an electronic power supply and control system for the current flowing through the resistive element, supply wires connecting the resistive element with the electronic power supply and current control system, and the end of the microwire is made with a variable profile in the form combinations of geometric figures - a truncated cone, a cylinder with a diameter smaller than the diameter of the base of the wire, and a cone, on the tip of which a device with an ECZ for manipulating micro- and nano-objects is fixed, and the heating element is located on the surface rhnosti cylinder with a smaller diameter.

EFFECT: improving the quality and manufacturability of the nanomanipulation process by minimizing the thermal drift of the manipulation device (nanopingers) during its thermal activation, which leads to a decrease in the manipulation process error, as well as a decrease in the current consumption and an increase in its speed and productivity in general.

3 cl, 3 ex, 12 dwg