FIELD: instrumentation; microsystem technology; nanomechanics.
SUBSTANCE: in particular the invention relates to the techniques of devices based on materials with a shape memory effect (SME) for manipulating micro- and nano-objects, used in radio electronics, mechanical engineering, nanotechnology, electron microscopy, medicine, biology. control system of a device with an SME for manipulating micro- and nano-objects includes a microwire, at its end a device with an SME for manipulating micro- and nano-objects is fixed on the opposite side from the place where the grip of the device is formed, as well as an operational field with a manipulated object and a heating source, and the base of the microwire is fixed in the nano-aligner, and the electronic power supply and current control system, as well as two lead wires connected to the electronic power supply and current control system, while there is an additional microwire, the end of which is attached to a device with an SME for manipulating micro- and nano-objects, and the other end of the additional microwire is connected to one of the lead wires, and the second lead wire is electrically connected to the base of the first microwire, while both microwires are electrically isolated and mechanically firmly fixed to each other using dielectric glue, in addition, the length of the auxiliary microwire is shorter than that of the microwire fixed in the nano-aligner.
EFFECT: improving the quality and manufacturability of the nanomanipulation process, reducing the error of the manipulation process, as well as reducing the current consumption and increasing its speed and productivity in general.
4 cl, 8 dwg
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Authors
Dates
2023-02-28—Published
2022-10-14—Filed